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A palm-sized PLC with a built-in Operator Panel. The panel offers a graphic display screen and keypad.
The Graphic HMI display screen can show images, text, and graphs according to real-time parameters. It can also display graphs based on historical values, to reflect trends of recorded data.
Use serial or TCP/IP MODBUS to create a multi-device network, and establish master-slave communication between PLCs and any connected device that supports the MODBUS protocol (SCADA systems, servos and other peripheral devices). Any controller in the network may function as either master or slave.
Visual indicators are used for faster troubleshooting of sensor problems utilizing terminal blocks with LED’s. The LED’s are indicators for the sensors mounted in the assembly from the top shelf down. The green LED is coupled to power and the red LED’s are coupled to the sensors output. When the sensor is blocked the red LED turns on or becomes brighter.
The version 10 systems use the latest technology for motion control for Exceptional Performance and Smoothness. All-in-one high performance brushless motors with integrated electronics and on-board electronics: driver, programmable motion controller and encoder for closed loop control increases functionality and repeatability.
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For 100mm, 125mm, and 150mm Wafers
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For high-reliability wafer transfer with a minimum of human interaction, MGI’s ET (Easy Transfer) 1000 and 2000 mass wafer transfer systems combine solid state technology, robotic control interfaces and precision stepper motor positioning to move wafers from carrier to carrier.
The ET advanced on-board computer, positioning sensors and precisely tooled wafer contact parts deliver proven wafer handling techniques and enhance yields.
The ET 1000 and 2000 series wafer transfer systems can become part of a completely integrated, automated environment via a nine-pin RS-232 serial port.
MGI’s ET series accepts standard, angle or contiguous carriers and can be configured for a variety of wafer
transfer needs:
• 25-25
• 25-50
• 12-13
• Back-to-back proximity
• 13-26 (300mm only)
• Teflon coated for CMP and wet decks
For production mode operation, a simple push-button keyboard gives the operator reliable control over wafer transfer operations. A simple mode select switch allows the operator to select transfer between process carrier to process carrier.
With a footprint of 11.80” wide, 11.40” deep and 25.62” high, the compact ET 1000 and 2000 systems weigh only 40 lbs. The ET 2000’s smooth-running stepper motors are computer controlled with built-in logic features that prevent damage to the system or wafers. For example, if the controls sense an unscheduled stop or obstruction in either stage, the ET’s elevator will reverse automatically and return to the starting position. Similar safety features prevent reloading accidents after power failures or system interrupts.
ET 1000 and 2000 models are available for 100mm, 125mm and 150mm wafers. These machines are designed to accommodate contiguous (angle) quartz, silicon carbide, polysilicon and entegris plastic carriers.
For unique applications, MGI offers custom design and manufacturing using our proprietary ET 1000 and 2000 transfer technology. ET 1000 and 2000 systems have been
modified for diverse semiconductor applications.
In 1974, MGI developed the first wafer transfer unit which revolutionized the semicondustor industry. Since that time the company has delivered over 10,000 wafer transfer systems, flat aligners, notch aligners and custom systems to semiconductor manufacturers throughout the world. With patented technology and precisely-tooled wafer contact and handling components, MGI has become a first choice among FAB managers.
For 100mm, 125mm, 150mm, 200mm and 300mm Wafers
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For high reliability wafer transfer with a minimum of human interaction, MGI’s EET 1000 and 2000 mass wafer transfer system combines solid state technology, robotic control interfaces and precision stepper motor positioning to move wafers from carrier to carrier.
The advanced on-board computer, positioning sensors and precisely tooled wafer contact parts, deliver proven wafer handling techniques and enhance yields.
The EET 1000 and 2000 series wafer transfer system can become part of a completely integrated, automated environment via a nine-pin RS-232 serial port.
EET 1000 and 2000 accepts standard or contiguous carriers and can be configured for a variety of wafer transfer needs.
• 25-25
• 25-50
• 12-13
• Back to back proximity
• 13-26 (300mm only)
• Teflon coated for CMP and wet docks
For production mode operation, a simple push-button keyboard gives the operator reliable control over wafer transfer operations. A simple mode select switch allows the operator to select transfer between process carrier to process carrier carrier.
Smooth-running stepper motors are computer controlled with built-in logic features that prevent damage to the system or wafers. For example, if the controls sense an unscheduled stop or obstruction in either stage, the EET’s elevator will reverse automatically and return to the starting position. Similar safety features prevent reloading accidents after power failures or sysyem interrupts.
Models are available for 100mm, 125mm and 150mm wafers.
These machines are designed to accommodate contiguous
(angle) quartz, silicon carbide, polysilicon, and entegris
carriers.
For 8” (200mm) wafers and 12” (300mm), a dedicated system
offers all functions found in other units.
For unique applications, MGI offers custom design and
manufacturing using our proprietary transfer technology.
Systems have been modified for diverse semiconductor
applications.
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XL-4400 (100 MM)
XL-5500 (125 MM)
XL-6600 (150 MM)
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XL-4400M (100 MM)
XL-5500M (125 MM)
XL-6600M (150 MM)
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MGI Electronics recently redesigned the 200mm Notch Aligner, by re-configuring the roller and notch stop assembly to gently lift to the wafers, align and eliminate contact to the
side walls of the plastic carrier.
MGI’s 200mm and 300mm Notch Aligners, offer interface ability with automation systems. Stand alone units are also available. The operation is controlled by a simple, pressuresensitive pad that automatically completes the notch alignment process. A micro-processor controlled electric stepper motor provides smooth precise movement. Power is provided by a 20V AC power converter or other power sources.
MGI’s service warranty coverage includes all parts, excluding wafer contact parts, and labor required for repair of systems used within the manufacturer’s warranty requirements. Extended post-warranty service and support are available with optional service and maintenance agreements.
MGI Electronics, LLC
1203 W Geneva Dr
Tempe, AZ 85282-3432
(480) 967-8011
(800) TEL-SERV
Fax: (480) 967-8015
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